@inproceedings{DATE21_GPU_LevelSet, author = {Yu, Ziyang and Chen, Guojin and Ma, Yuzhe and Yu, Bei}, booktitle = {2021 Design, Automation & Test in Europe Conference & Exhibition (DATE)}, title = {A GPU-enabled Level Set Method for Mask Optimization}, year = {2021}, pages = {1835-1838}, doi = {10.23919/DATE51398.2021.9474212} } @inproceedings{ICCAD20_DAMO, author = {Chen, Guojin and Chen, Wanli and Ma, Yuzhe and Yang, Haoyu and Yu, Bei}, title = {{DAMO}: Deep Agile Mask Optimization for Full Chip Scale}, year = {2020}, url = {https://doi.org/10.1145/3400302.3415705}, doi = {10.1145/3400302.3415705}, booktitle = {Proceedings of the 39th International Conference on Computer-Aided Design} } @inproceedings{ISPD21_Pointcloud, author = {Li, Wei and Chen, Guojin and Yang, Haoyu and Chen, Ran and Yu, Bei}, title = {Learning Point Clouds in EDA}, year = {2021}, isbn = {9781450383004}, url = {https://doi.org/10.1145/3439706.3446895}, doi = {10.1145/3439706.3446895}, booktitle = {Proceedings of the 2021 International Symposium on Physical Design} } @inproceedings{ICCAD21_DevelSet, author = {Chen, Guojin and Yu, Ziyang and Liu, Hongduo and Ma, Yuzhe and Yu, Bei}, title = {{DevelSet}: Deep Neural Level Set for Instant Mask Optimization}, year = {2021}, url = {https://doi.org/10.1109/ICCAD51958.2021.9643464}, doi = {10.1109/ICCAD51958.2021.9643464}, booktitle = {2021 IEEE/ACM International Conference On Computer Aided Design (ICCAD)} } @inproceedings{ICCAD22_LayoutTransformer, author = {Wen, Liangjian and Zhu, Yi and Ye, Lei and Chen, Guojin and Yu, Bei and Liu, Jianzhuang and Xu, Chunjing}, title = {{LayouTransformer}: Generating Layout Patterns with Transformer via Sequential Pattern Modeling}, year = {2022}, isbn = {9781450392174}, url = {https://doi.org/10.1145/3508352.3549350}, doi = {10.1145/3508352.3549350}, booktitle = {Proceedings of the 41st IEEE/ACM International Conference on Computer-Aided Design} } @inproceedings{ICCAD22_AdaOPC, author = {Zhao, Wenqian and Yao, Xufeng and Yu, Ziyang and Chen, Guojin and Ma, Yuzhe and Yu, Bei and Wong, Martin D. F.}, title = {{AdaOPC}: A Self-Adaptive Mask Optimization Framework for Real Design Patterns}, year = {2022}, isbn = {9781450392174}, url = {https://doi.org/10.1145/3508352.3549468}, doi = {10.1145/3508352.3549468}, booktitle = {Proceedings of the 41st IEEE/ACM International Conference on Computer-Aided Design} } @inproceedings{ECCV22_hilbert, author = {Chen, Wanli and Zhu, Xinge and Chen, Guojin and Yu, Bei}, title = {Efficient Point Cloud Analysis Using Hilbert Curve}, year = {2022}, url = {https://doi.org/10.1007/978-3-031-20086-1_42}, doi = {10.1007/978-3-031-20086-1_42}, booktitle = {ECCV 2022: 17th European Conference, Tel Aviv, Israel, October 23–27, 2022, Proceedings, Part II} } @misc{OPC_OpenILT, author = {Zheng, Su and Ma, Yuzhe and Zhu, Binwu and Chen,Guojin and Zhao, Wenqian and Yin, Shuo and Yu, Ziyang and Yu, Bei}, title = {{OpenILT}: An Open-source Platform for Inverse Lithography Technique Research}, year = {2023}, publisher = {GitHub}, journal = {GitHub repository}, howpublished = {\url{https://github.com/OpenOPC/OpenILT/}} } @inproceedings{SPIE23_GPU_MPL, author = {Chen, Guojin and Yang, Haoyu and Yu, Bei}, title = {{GPU-accelerated matrix cover algorithm for multiple patterning layout decomposition}}, booktitle = {DTCO and Computational Patterning II}, organization = {International Society for Optics and Photonics}, publisher = {SPIE}, year = {2023}, doi = {10.1117/12.2657904}, url = {https://doi.org/10.1117/12.2657904} } @inproceedings{SPIE24_difflitho, title = {Open-Source Differentiable Lithography Imaging Framework}, author = {Chen, Guojin and Geng, Hao and Yu, Bei and Pan, David Z.}, booktitle = {SPIE, Advanced Lithography + Patterning}, organization = {International Society for Optics and Photonics}, publisher = {SPIE}, year = {2024}, month = {3} } @inproceedings{DAC23_DiffPattern, title = {{DiffPattern}: Layout Pattern Generation via Discrete Diffusion}, author = {Wang, Zixiao and Shen, Yunheng and Zhao, Wenqian and Bai, Yang and Chen, Guojin and Farnia, Farzan and Yu, Bei}, booktitle = {ACM/IEEE Design Automation Conference (DAC)}, year = {2023} } @inproceedings{DAC23_Nitho, title = {Physics-informed optical kernel regression using complex-valued neural fields}, author = {Chen, Guojin and Pei, Zehua and Yang, Haoyu and Ma, Yuzhe and Yu, Bei and Wong, Martin}, booktitle = {2023 60th ACM/IEEE Design Automation Conference (DAC)}, pages = {1--6}, year = {2023}, organization = {IEEE} } @inproceedings{ICCAD23:AlphaSyn, author = {Pei, Zehua and Liu, Fangzhou and He, Zhuolun and Chen, Guojin and Zheng, Haisheng and Zhu, Keren and Yu, Bei}, booktitle = {2023 IEEE/ACM International Conference on Computer Aided Design (ICCAD)}, title = {{AlphaSyn}: Logic Synthesis Optimization with Efficient Monte Carlo Tree Search}, year = {2023}, pages = {1-9}, doi = {10.1109/ICCAD57390.2023.10323856} } @inproceedings{DAC24_BiSMO, title = {Efficient Bilevel Source Mask Optimization}, author = {Chen, Guojin and He, Hongquan and Xu, Peng and Geng, Hao and Yu, Bei}, booktitle = {2024 61th ACM/IEEE Design Automation Conference (DAC)}, pages = {1-6}, year = {2024}, month = {7}, organization = {IEEE}, } % ===================================================================== % Journal papers % ===================================================================== @article{TCAD22_DAMO, author = {Chen, Guojin and Chen, Wanli and Sun, Qi and Ma, Yuzhe and Yang, Haoyu and Yu, Bei}, journal = {IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems}, title = {{DAMO}: Deep Agile Mask Optimization for Full-Chip Scale}, year = {2022}, volume = {41}, number = {9}, pages = {3118-3131}, doi = {10.1109/TCAD.2021.3116511} } @article{TCAD_DevelSet, author = {Chen, Guojin and Yu, Ziyang and Liu, Hongduo and Ma, Yuzhe and Yu, Bei}, journal = {IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems}, title = {{DevelSet}: Deep Neural Level Set for Instant Mask Optimization}, year = {2023}, doi = {10.1109/TCAD.2023.3286262} } @article{TCAD_GPU_LevelSet, author = {Yu, Ziyang and Chen, Guojin and Ma, Yuzhe and Yu, Bei}, journal = {IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems}, title = {A GPU-Enabled Level-Set Method for Mask Optimization}, year = {2023}, volume = {42}, number = {2}, pages = {594-605}, doi = {10.1109/TCAD.2022.3175939} } @article{L2OILT_TCAD, author = {Zhu, Binwu and Zheng, Su and Yu, Ziyang and Chen, Guojin and Ma, Yuzhe and Yang, Fan and Yu, Bei and Wong, Martin}, journal = {IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems}, title = {L2O-ILT: Learning to Optimize Inverse Lithography Techniques}, year = {2023}, month = {09} } @article{TCAD_DiffSMO, author = {Chen, Guojin and Wang, Zixiao and Yu, Bei and Pan, David Z. and Wong, Martin D.F.}, journal = {IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems}, title = {Ultra-Fast Source Mask Optimization via Conditional Discrete Diffusion}, year = {2024}, pages = {1-1}, doi = {10.1109/TCAD.2024.3361400} }